Scratch Test of TiCN Thin Films with Different Preferred Orientation
نویسندگان
چکیده
منابع مشابه
Preferred crystal orientation of sol-gel-derived Bi4-xLaxTi3O12 thin films on silicon substrates.
Polycrystalline thin films of La-substituted bismuth titanate (BLT) were formed directly on p-type Si(100) substrates by using sol-gel and spin coat methods. The BLT film and interfacial layer between BLT and Si were quantitatively investigated by the X-ray reflectivity method. Also, crystal orientations of sub-100-nm-thick BLT thin films were confirmed by X-ray diffraction using a synchrotron ...
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چکیده ندارد.
15 صفحه اولPlane-strain bulge test for thin films
The plane-strain bulge test is a powerful new technique for measuring the mechanical properties of thin films. In this technique, the stress–strain curve of a thin film is determined from the pressure-deflection behavior of a long rectangular membrane made of the film of interest. For a thin membrane in a state of plane strain, film stress and stain are distributed uniformly across the membrane...
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ژورنال
عنوان ژورنال: Materials Science Forum
سال: 2006
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/msf.524-525.729